Buckling Electrothermal NEMS Actuators: Analytic Design for Very Slender Beams

Analytic approximations are presented for the response of buckling-mode electrothermal actuators with very slender beams a width-to-length ratio W/L≤0.001 type found in nanoelectromechanical systems (NEMS). The results as closed-form solutions to Euler beam bending theory rather than by an iterative numerical solution or time-consuming finite element analysis. Expressions transverse deflections and stiffness common raised cosine chevron pre-buckled shapes. valid when effects dominate over those axial compression. A few higher-order also less 0.001≤W/L≤0.01.